Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8574409 | Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source | Stanislav Kadlec, Frantisek Balon, Juergen Weichart | 2013-11-05 |
| 8491252 | Transport method for disk-shaped workpieces | Holger Christ | 2013-07-23 |
| 8246794 | Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source | Stanislav Kadlec, Frantisek Balon, Juergen Weichart | 2012-08-21 |
| 7706908 | Method for positioning a wafer | Holger Christ, Ruedi Schmucki | 2010-04-27 |
| 7067399 | Method and apparatus for removal of surface contaminants from substrates in vacuum applications | — | 2006-06-27 |
| 6291940 | Blanker array for a multipixel electron source | — | 2001-09-18 |