Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387079 | Plasma etch chamber and method of plasma etching | Frantisek Balon, Ben Curtis | 2022-07-12 |
| 11380530 | Reactive sputtering with HIPIMS | Juergen Weichart, Stanislav Kadlec | 2022-07-05 |
| 10784092 | Reactive sputtering with HIPIMs | Juergen Weichart, Stanislav Kadlec | 2020-09-22 |
| 10388559 | Apparatus for depositing a layer on a substrate in a processing gas | Sven Uwe Rieschl, Jurgen Weichart | 2019-08-20 |
| 9644261 | Apparatus for sputtering and a method of fabricating a metallization structure | Juergen Weichart, Stefan Bammesberger, Dennis Minkoley | 2017-05-09 |
| 9490166 | Apparatus and method for depositing a layer onto a substrate | Sven Uwe Rieschl, Jurgen Weichart | 2016-11-08 |
| 8691058 | Apparatus for sputtering and a method of fabricating a metallization structure | Juergen Weichart, Stefan Bammesberger, Dennis Minkoley | 2014-04-08 |