Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6860977 | Method for manufacturing a workpiece using a magnetron sputter source | Bernd Heinz, Martin Dubs, Thomas Eisenhammer, Walter Haag, Stanislav Kadlec +1 more | 2005-03-01 |
| 6682637 | Magnetron sputter source | Bernd Heinz, Martin Dubs, Thomas Eisenhammer, Walter Haag, Stanislav Kadlec +1 more | 2004-01-27 |
| 6679977 | Method of producing flat panels | Walter Haag, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer | 2004-01-20 |
| 6454920 | Magnetron sputtering source | Walter Haag, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer | 2002-09-24 |
| 6284106 | Method of producing flat panels | Walter Haag, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer | 2001-09-04 |
| 6093293 | Magnetron sputtering source | Walter Haag, Urs Schwendener, Markus Schlegel, Siegfried Krassnitzer | 2000-07-25 |
| 5399253 | Plasma generating device | — | 1995-03-21 |