Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9587306 | Method for producing a directional layer by cathode sputtering, and device for implementing the method | Hartmut Rohrmann, Hanspeter Friedli, Jurgen Weichart, Stanislav Kadlec | 2017-03-07 |
| 9214589 | Method of inline manufacturing a solar cell panel | Stephan Voser, Oliver Rattunde, Gerald Feistritzer, Volker Wuestenhagen, Gerhard Dovids | 2015-12-15 |
| 7335521 | Method for the production of multilayer discs | Wolfgang Nutt, Helfried Weinzerl, Thomas Eisenhammer | 2008-02-26 |
| 7033471 | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers | Roman Schertler | 2006-04-25 |
| 6899795 | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers | Roman Schertler | 2005-05-31 |
| 6860977 | Method for manufacturing a workpiece using a magnetron sputter source | Bernd Heinz, Thomas Eisenhammer, Pius Grunenfelder, Walter Haag, Stanislav Kadlec +1 more | 2005-03-01 |
| 6802942 | Storage plate support for receiving disk-shaped storage plates | Stephan Voser | 2004-10-12 |
| 6776882 | Method for producing a hybrid disk and hybrid disks | — | 2004-08-17 |
| 6692618 | Magnetron sputter source with multipart target | — | 2004-02-17 |
| 6682637 | Magnetron sputter source | Bernd Heinz, Thomas Eisenhammer, Pius Grunenfelder, Walter Haag, Stanislav Kadlec +1 more | 2004-01-27 |
| 6454908 | Vacuum treatment system | Roman Schertler | 2002-09-24 |
| 6123814 | Coating station | Roman Schertler, Gregor Strasser | 2000-09-26 |
| 5911861 | Coating station | Roman Schertler, Gregor Strasser | 1999-06-15 |
| 5738729 | Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method | — | 1998-04-14 |