Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE40192 | Vacuum process apparatus | — | 2008-04-01 |
| RE40191 | Vacuum process apparatus | — | 2008-04-01 |
| 7033471 | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers | Martin Dubs | 2006-04-25 |
| 6899795 | Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers | Martin Dubs | 2005-05-31 |
| 6818108 | Chamber for the transport of workpieces in a vacuum atmosphere, a chamber combination and a method for transporting a workpiece | — | 2004-11-16 |
| 6730194 | Method for manufacturing disk-shaped workpieces with a sputter station | — | 2004-05-04 |
| 6550776 | Intermediate metallic layer for flat packing and process for the production of a flat packing with such an intermediate layer | — | 2003-04-22 |
| 6481955 | Vacuum treatment equipment | — | 2002-11-19 |
| 6453543 | Transport and transfer device | Peter Tinner, Josef Marthy, Stephan Voser | 2002-09-24 |
| 6454908 | Vacuum treatment system | Martin Dubs | 2002-09-24 |
| 6416640 | Sputter station | — | 2002-07-09 |
| 6364955 | Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method | — | 2002-04-02 |
| 6325856 | Vacuum treatment equipment | — | 2001-12-04 |
| 6182973 | Intermediate metallic layer for flat packing and process for the production of a flat packing with such an intermediate layer | — | 2001-02-06 |
| 6123814 | Coating station | Martin Dubs, Gregor Strasser | 2000-09-26 |
| 6096231 | Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method | — | 2000-08-01 |
| 5911861 | Coating station | Martin Dubs, Gregor Strasser | 1999-06-15 |
| 5882171 | Transport and transfer apparatus | Peter Tinner, Josef Marthy, Stephan Voser | 1999-03-16 |
| 5865588 | Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method | — | 1999-02-02 |
| 5662785 | Method for masking a workpiece and a vacuum treatment facility | — | 1997-09-02 |
| 5590994 | Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method | — | 1997-01-07 |
| 5571331 | Vacuum treatment apparatus | Paul Muralt | 1996-11-05 |
| 5549435 | Chamber and a chamber combination for a vacuum facility and a method for transporting through at least one workpiece | — | 1996-08-27 |
| 5490913 | Magnetic field enhanced sputtering arrangement with vacuum treatment apparatus | Walter Haag, Peter Kohler | 1996-02-13 |
| 5415729 | Vacuum treatment apparatus | Gregor Strasser, Pius Good, Jurg Steinmann | 1995-05-16 |