Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11952654 | Liquid sputter target | Dominik Jaeger, Thomas Tschirky, Marco Rechsteiner, Heinz Felzer | 2024-04-09 |
| 11848179 | Methods of and apparatus for magnetron sputtering | Claudiu Valentin Falub, Martin Bless | 2023-12-19 |
| 11551950 | Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpiece | Heinz Felzer, Dominik Jaeger, Hubert Breuss | 2023-01-10 |
| 11476099 | Methods of and apparatus for magnetron sputtering | Claudiu Valentin Falub, Martin Bless | 2022-10-18 |
| 9587306 | Method for producing a directional layer by cathode sputtering, and device for implementing the method | Hanspeter Friedli, Jurgen Weichart, Stanislav Kadlec, Martin Dubs | 2017-03-07 |
| 8540850 | Target arrangement for mounting / dismounting and method of manufacturing | Marcel Neusch, Peter Schlegel, Oliver Rattunde | 2013-09-24 |