Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848179 | Methods of and apparatus for magnetron sputtering | Hartmut Rohrmann, Claudiu Valentin Falub | 2023-12-19 |
| 11476099 | Methods of and apparatus for magnetron sputtering | Hartmut Rohrmann, Claudiu Valentin Falub | 2022-10-18 |
| 11380520 | RF power delivery to vacuum plasma processing | Stefan Rhyner | 2022-07-05 |
| 10295110 | Adapter for vacuum-insulated lines | — | 2019-05-21 |