Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11952654 | Liquid sputter target | Dominik Jaeger, Thomas Tschirky, Marco Rechsteiner, Hartmut Rohrmann | 2024-04-09 |
| 11551950 | Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpiece | Hartmut Rohrmann, Dominik Jaeger, Hubert Breuss | 2023-01-10 |
| 9607831 | Method for depositing an aluminium nitride layer | Lorenzo Castaldi, Martin Kratzer, Robert Mamazza, JR., Bernd Heinz | 2017-03-28 |
| 9478420 | Method for depositing a group III nitride semiconductor film | Lorenzo Castaldi, Martin Kratzer, Robert Mamazza, JR. | 2016-10-25 |
| 8268142 | RF sputtering arrangement | Jurgen Weichart | 2012-09-18 |