Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209302 | Vacuum system and method to deposit a compound layer | Kai Wenz, Boris Trajcevski, Philip Zeller | 2025-01-28 |
| 10224188 | RF sputtering arrangement | — | 2019-03-05 |
| 9607831 | Method for depositing an aluminium nitride layer | Lorenzo Castaldi, Heinz Felzer, Robert Mamazza, JR., Bernd Heinz | 2017-03-28 |
| 9478420 | Method for depositing a group III nitride semiconductor film | Lorenzo Castaldi, Heinz Felzer, Robert Mamazza, JR. | 2016-10-25 |
| 7520954 | Method and apparatus for separating disc-shaped substrates | Bernd Heinz | 2009-04-21 |