Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776881 | Magnetron atomization source and method of use thereof | Pius Gruenenfelder, Hans Hirscher, Walter Haag | 2004-08-17 |
| 6679977 | Method of producing flat panels | Walter Haag, Pius Grunenfelder, Markus Schlegel, Siegfried Krassnitzer | 2004-01-20 |
| 6454920 | Magnetron sputtering source | Walter Haag, Pius Grunenfelder, Markus Schlegel, Siegfried Krassnitzer | 2002-09-24 |
| 6284106 | Method of producing flat panels | Walter Haag, Pius Grunenfelder, Markus Schlegel, Siegfried Krassnitzer | 2001-09-04 |
| 6093293 | Magnetron sputtering source | Walter Haag, Pius Grunenfelder, Markus Schlegel, Siegfried Krassnitzer | 2000-07-25 |
| 5688381 | Magnetron atomization source and method of use thereof | Pius Gruenenfelder, Hans Hirscher, Walter Haag | 1997-11-18 |
| 5676810 | Target mounting-demounting arrangement | — | 1997-10-14 |