Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776881 | Magnetron atomization source and method of use thereof | Pius Gruenenfelder, Urs Schwendener, Walter Haag | 2004-08-17 |
| 6540883 | Magnetron sputtering source and method of use thereof | Pius Gruenenfelder, Walter Haag, Walter Albertin | 2003-04-01 |
| 5997697 | Magnetron sputtering source and method of use thereof | Pius Gruenenfelder, Walter Haag, Walter Albertin | 1999-12-07 |
| 5688381 | Magnetron atomization source and method of use thereof | Pius Gruenenfelder, Urs Schwendener, Walter Haag | 1997-11-18 |
| 5180000 | Workpiece carrier with suction slot for a disk-shaped workpiece | Rudolf Wagner | 1993-01-19 |
| 5051054 | Elevating table and transporting method | Rudolf Wagner | 1991-09-24 |
| 5033538 | Workpiece carrier for a disk-shaped workpiece as well as a vacuum process space | Rudolf Wagner | 1991-07-23 |
| 4903754 | Method and apparatus for the transmission heat to or from plate like object | Rudolf Wagner | 1990-02-27 |