Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7678239 | Sliding anode magnetron sputtering source | Walter Haag | 2010-03-16 |
| 6776881 | Magnetron atomization source and method of use thereof | Hans Hirscher, Urs Schwendener, Walter Haag | 2004-08-17 |
| 6540883 | Magnetron sputtering source and method of use thereof | Hans Hirscher, Walter Haag, Walter Albertin | 2003-04-01 |
| 6337001 | Process for sputter coating, a sputter coating source, and sputter coating apparatus with at least one such source | Walter Haag | 2002-01-08 |
| 5997697 | Magnetron sputtering source and method of use thereof | Hans Hirscher, Walter Haag, Walter Albertin | 1999-12-07 |
| 5833823 | Sputter source with a target arrangement and a holding device | Peter Buechel, Klaus Leitner, Walter Haag | 1998-11-10 |
| 5688381 | Magnetron atomization source and method of use thereof | Hans Hirscher, Urs Schwendener, Walter Haag | 1997-11-18 |