Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540883 | Magnetron sputtering source and method of use thereof | Pius Gruenenfelder, Hans Hirscher, Walter Haag | 2003-04-01 |
| 5997697 | Magnetron sputtering source and method of use thereof | Pius Gruenenfelder, Hans Hirscher, Walter Haag | 1999-12-07 |