Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5833823 | Sputter source with a target arrangement and a holding device | Pius Gruenenfelder, Klaus Leitner, Walter Haag | 1998-11-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5833823 | Sputter source with a target arrangement and a holding device | Pius Gruenenfelder, Klaus Leitner, Walter Haag | 1998-11-10 |