Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001444 | Surface inspecting method | Kang-Woong Ko, Sung Yoon Ryu, Young-Hoon Sohn, Gil-woo Song, Tae-Heung Ahn +6 more | 2018-06-19 |
| 9841688 | Method for detecting overlay error and method for manufacturing semiconductor device using the same | Kang-Woong Ko, Hyoung-Jo Jeon, Gil-woo Song | 2017-12-12 |
| 7929139 | Spectroscopic ellipsometer, film thickness measuring apparatus, and method of focusing in spectroscopic ellipsometer | Kumiko Fukue | 2011-04-19 |
| 7710579 | Measuring method and apparatus for measuring depth of trench pattern | Shinji Yamaguchi | 2010-05-04 |
| 7711249 | Recording/reproduction device and method | Kojiro Kawasaki, Hiroyuki Kondo | 2010-05-04 |
| 7612873 | Surface form measuring apparatus and stress measuring apparatus and surface form measuring method and stress measuring method | Kumiko Akashika | 2009-11-03 |
| 7555199 | Recording apparatus, OSD controlling method, program, and recording medium | Youichi Yamamoto | 2009-06-30 |
| 7254318 | Recording apparatus, recording program, and recording method | Masayuki Imada, Ryuichi Hori, Masahiro Kawasaki, Toru Suetomo | 2007-08-07 |
| 7177531 | Record and playback apparatus and record medium | Masako Ninomiya, Ryuichi Hori, Shuji Okamoto, Atsushi Hashimoto | 2007-02-13 |
| 7095498 | Spectroscopic ellipsometer | — | 2006-08-22 |
| 6937333 | Apparatus for measuring film thickness formed on object, apparatus and method of measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object | Hideki Hayashi, Fujikazu Kitamura, Kumiko Akashika | 2005-08-30 |
| 6879408 | Printer driver, printer, and recording medium on which printer driver program is recorded | Ryuichi Hori, Shuji Okamoto | 2005-04-12 |
| 6862095 | Method of measuring dielectric constant using light in a plurality of wavelength ranges | — | 2005-03-01 |
| 6020968 | Method of and apparatus for inspecting residue of metal film | — | 2000-02-01 |
| 5841894 | Three-dimensional detecting method and three-dimensional detecting apparatus | — | 1998-11-24 |
| 5686993 | Method of and apparatus for measuring film thickness | Masahiko Kokubo | 1997-11-11 |
| 5493401 | Method of measuring film thicknesses | Nariaki Fujiwara, Masahiko Kokubo | 1996-02-20 |
| 5440141 | Method of measuring a thickness of a multilayered sample using ultraviolet light and light with wavelengths longer than ultraviolet | — | 1995-08-08 |
| 5422703 | Reflected light measuring method and reflected light measuring apparatus for a microscopic photometric system | Nariaki Fujiwara, Masahiko Kokubo | 1995-06-06 |
| 5136149 | Method of focusing optical head on object body and automatic focusing device for optical inspection system including tilt detection | Nariaki Fujiwara | 1992-08-04 |