Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113859 | Imaging apparatus and imaging method | Kenji Ueyama | 2018-10-30 |
| 7929139 | Spectroscopic ellipsometer, film thickness measuring apparatus, and method of focusing in spectroscopic ellipsometer | Masahiro Horie | 2011-04-19 |
| 7864318 | Spectroscopic ellipsometer and ellipsometry | — | 2011-01-04 |
| 7557919 | Apparatus for detecting position of substrate, ellipsometer, and film thickness measuring apparatus | — | 2009-07-07 |