Issued Patents All Time
Showing 26–50 of 161 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9859100 | Method and system for dimensional uniformity using charged particle beam lithography | Kazuyuki Hagiwara, Robert C. Pack | 2018-01-02 |
| 9797453 | Wheel bearing apparatus | Takayuki Norimatsu, Hiroaki Itakura, Hironori Imanaka, Syougo Suzuki, Isao Hirai +2 more | 2017-10-24 |
| 9715169 | Method and system for forming a pattern on a reticle using charged particle beam lithography | — | 2017-07-25 |
| 9625809 | Method and system for forming patterns using charged particle beam lithography with variable pattern dosage | Harold Robert Zable | 2017-04-18 |
| 9612530 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Kazuyuki Hagiwara, Stephen F. Meier, Ingo Bork | 2017-04-04 |
| 9534635 | Wheel bearing apparatus | Takayuki Norimatsu, Hiroaki Itakura, Hironori Imanaka, Syougo Suzuki, Isao Hirai +2 more | 2017-01-03 |
| 9465297 | Method and system for forming patterns with charged particle beam lithography | Ingo Bork | 2016-10-11 |
| 9448473 | Method for fracturing and forming a pattern using shaped beam charged particle beam lithography | Michael Tucker | 2016-09-20 |
| 9400857 | Method and system for forming patterns using charged particle beam lithography | Anatoly Aadamov, Eldar Khaliullin, Ingo Bork | 2016-07-26 |
| 9372391 | Method and system for forming patterns using charged particle beam lithography with variable pattern dosage | Harold Robert Zable | 2016-06-21 |
| 9343267 | Method and system for dimensional uniformity using charged particle beam lithography | Kazuyuki Hagiwara, Robert C. Pack | 2016-05-17 |
| 9341936 | Method and system for forming a pattern on a reticle using charged particle beam lithography | — | 2016-05-17 |
| 9323140 | Method and system for forming a pattern on a reticle using charged particle beam lithography | — | 2016-04-26 |
| 9274412 | Method and system for design of a reticle to be manufactured using variable shaped beam lithography | — | 2016-03-01 |
| 9268214 | Method for forming circular patterns on a surface | Michael Tucker | 2016-02-23 |
| 9164372 | Method and system for forming non-manhattan patterns using variable shaped beam lithography | Ingo Bork, Etienne Jacques | 2015-10-20 |
| 9104109 | Method and system for improving critical dimension uniformity using shaped beam lithography | Ryan Pearman, Anatoly Aadamov | 2015-08-11 |
| 9091946 | Method and system for forming non-manhattan patterns using variable shaped beam lithography | Ingo Bork, Etienne Jacques | 2015-07-28 |
| 9057956 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Kazuyuki Hagiwara, Stephen F. Meier, Ingo Bork | 2015-06-16 |
| 9043734 | Method and system for forming high accuracy patterns using charged particle beam lithography | Kazuyuki Hagiwara, Stephen F. Meier, Ingo Bork | 2015-05-26 |
| 9038003 | Method and system for critical dimension uniformity using charged particle beam lithography | Ryan Pearman, Robert C. Pack | 2015-05-19 |
| 9034542 | Method and system for forming patterns with charged particle beam lithography | Ingo Bork | 2015-05-19 |
| 8959463 | Method and system for dimensional uniformity using charged particle beam lithography | Kazuyuki Hagiwara, Robert C. Pack, Anatoly Aadamov | 2015-02-17 |
| 8952546 | Integrated circuit designed and manufactured using diagonal minimum-width patterns | Larry Lam Chau, Tam Dinh Thanh Nguyen | 2015-02-10 |
| 8916315 | Method for fracturing and forming a pattern using shaped beam charged particle beam lithography | Michael Tucker | 2014-12-23 |