Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031413 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Anatoly Aadamov, Ingo Bork | 2018-07-24 |
| 9400857 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Anatoly Aadamov, Ingo Bork | 2016-07-26 |
| 8719739 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Anatoly Aadamov, Ingo Bork | 2014-05-06 |