Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031413 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Anatoly Aadamov, Eldar Khaliullin | 2018-07-24 |
| 9612530 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier | 2017-04-04 |
| 9465297 | Method and system for forming patterns with charged particle beam lithography | Akira Fujimura | 2016-10-11 |
| 9400857 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Anatoly Aadamov, Eldar Khaliullin | 2016-07-26 |
| 9164372 | Method and system for forming non-manhattan patterns using variable shaped beam lithography | Akira Fujimura, Etienne Jacques | 2015-10-20 |
| 9091946 | Method and system for forming non-manhattan patterns using variable shaped beam lithography | Akira Fujimura, Etienne Jacques | 2015-07-28 |
| 9057956 | Method and system for design of enhanced edge slope patterns for charged particle beam lithography | Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier | 2015-06-16 |
| 9043734 | Method and system for forming high accuracy patterns using charged particle beam lithography | Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier | 2015-05-26 |
| 9034542 | Method and system for forming patterns with charged particle beam lithography | Akira Fujimura | 2015-05-19 |
| 8719739 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Anatoly Aadamov, Eldar Khaliullin | 2014-05-06 |
| 8703389 | Method and system for forming patterns with charged particle beam lithography | Akira Fujimura | 2014-04-22 |
| 8473875 | Method and system for forming high accuracy patterns using charged particle beam lithography | Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier | 2013-06-25 |