| 10031413 |
Method and system for forming patterns using charged particle beam lithography |
Akira Fujimura, Anatoly Aadamov, Eldar Khaliullin |
2018-07-24 |
| 9612530 |
Method and system for design of enhanced edge slope patterns for charged particle beam lithography |
Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier |
2017-04-04 |
| 9465297 |
Method and system for forming patterns with charged particle beam lithography |
Akira Fujimura |
2016-10-11 |
| 9400857 |
Method and system for forming patterns using charged particle beam lithography |
Akira Fujimura, Anatoly Aadamov, Eldar Khaliullin |
2016-07-26 |
| 9164372 |
Method and system for forming non-manhattan patterns using variable shaped beam lithography |
Akira Fujimura, Etienne Jacques |
2015-10-20 |
| 9091946 |
Method and system for forming non-manhattan patterns using variable shaped beam lithography |
Akira Fujimura, Etienne Jacques |
2015-07-28 |
| 9057956 |
Method and system for design of enhanced edge slope patterns for charged particle beam lithography |
Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier |
2015-06-16 |
| 9043734 |
Method and system for forming high accuracy patterns using charged particle beam lithography |
Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier |
2015-05-26 |
| 9034542 |
Method and system for forming patterns with charged particle beam lithography |
Akira Fujimura |
2015-05-19 |
| 8719739 |
Method and system for forming patterns using charged particle beam lithography |
Akira Fujimura, Anatoly Aadamov, Eldar Khaliullin |
2014-05-06 |
| 8703389 |
Method and system for forming patterns with charged particle beam lithography |
Akira Fujimura |
2014-04-22 |
| 8473875 |
Method and system for forming high accuracy patterns using charged particle beam lithography |
Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier |
2013-06-25 |