Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031413 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Eldar Khaliullin, Ingo Bork | 2018-07-24 |
| 9400857 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Eldar Khaliullin, Ingo Bork | 2016-07-26 |
| 9104109 | Method and system for improving critical dimension uniformity using shaped beam lithography | Akira Fujimura, Ryan Pearman | 2015-08-11 |
| 8959463 | Method and system for dimensional uniformity using charged particle beam lithography | Akira Fujimura, Kazuyuki Hagiwara, Robert C. Pack | 2015-02-17 |
| 8719739 | Method and system for forming patterns using charged particle beam lithography | Akira Fujimura, Eldar Khaliullin, Ingo Bork | 2014-05-06 |