Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417942 | Process for hydrophilically bonding substrates | Francois Rieutord, Jean-Michel Hartmann, Frank Fournel, Didier Landru, Oleg Kononchuk +1 more | 2025-09-16 |
| 12334347 | Detachable structure used for transferring or handling layers, and process for transferring a layer using the detachable structure | François-Xavier Darras | 2025-06-17 |
| 11081463 | Bonding method with electron-stimulated desorption | Frank Fournel, Sylvain Maitrejean, Christophe Morales | 2021-08-03 |
| 11054402 | Method and device for checking a bond between two substrates | Frank Fournel, Ali Dekious, Emilie DELOFFRE, Gilles Despaux, Emmanuel Le Clezio | 2021-07-06 |
| 10957539 | Method for bonding by direct adhesion | Frank Fournel, Christophe Morales, Marwan Tedjini | 2021-03-23 |
| 10643884 | Method for manufacturing a semiconductor structure with temporary direct bonding using a porous layer | Elodie Beche, Frank Fournel | 2020-05-05 |
| 10290721 | Method of fabricating an electromechanical structure including at least one mechanical reinforcing pillar | Francois Perruchot, Bernard Diem, Laurent Clavelier, Philippe Robert | 2019-05-14 |
| 9783407 | Method for making a suspended membrane structure with buried electrode | Sophie Giroud, Audrey Berthelot, Jean-Philippe Polizzi, Marie-Helene Vaudaine | 2017-10-10 |
| 9362255 | Method for manufacturing a multilayer structure on a substrate | Umberto Rossini, Thierry Flahaut | 2016-06-07 |
| 9029178 | Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate | Jean-Philippe Polizzi | 2015-05-12 |
| 8999860 | Process for producing at least one silicon-based nanoelement in a silicon oxide section and process for the manufacture of a device employing the production process | Laurent Vandroux, Audrey Berthelot, Marie-Helene Vaudaine | 2015-04-07 |
| 8692337 | Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration | Audrey Berthelot, Jean-Philippe Polizzi, Marie-Helene Vaudaine, Hemant D. Desai, Woo Tae Park | 2014-04-08 |
| 8076169 | Method of fabricating an electromechanical device including at least one active element | Francois Perruchot, Bernard Diem, Laurent Clavelier, Emmanuel Defay | 2011-12-13 |
| 7993949 | Heterogeneous substrate including a sacrificial layer, and a method of fabricating it | Francois Perruchot, Bernard Diem, Laurent Clavelier, Emmanuel Defay | 2011-08-09 |
| 7906439 | Method of fabricating a MEMS/NEMS electromechanical component | Francois Perruchot, Bernard Diem, Laurent Clavelier, Emmanuel Defay | 2011-03-15 |