Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538718 | Method of producing semiconductor devices in a substrate including etching of the pattern of an etch mask and/or a reticle to create the first dicing lanes encircling the devices and second dicing lanes defined by fracture lines of the edges of the substrate | Mikael Colin | 2022-12-27 |
| 11459227 | Hinged microelectromechanical and/or nanoelectromechanical device with out-of-plane movement | Loic Joet | 2022-10-04 |
| 11312618 | Microdevice comprising at least two movable elements | Mikael Colin, Alain Jeanroy, Guillaume Lehee, Olivier Vancauwenberghe, Philippe Onfroy +1 more | 2022-04-26 |
| 10472227 | Micro-device having a plurality of mobile elements arranged in a plurality of embedded cavities | Mikael Colin | 2019-11-12 |
| 9802817 | Method for making suspended elements with different thicknesses for a MEMS and NEMS structure | — | 2017-10-31 |
| 9783407 | Method for making a suspended membrane structure with buried electrode | Sophie Giroud, Vincent Larrey, Jean-Philippe Polizzi, Marie-Helene Vaudaine | 2017-10-10 |
| 8999860 | Process for producing at least one silicon-based nanoelement in a silicon oxide section and process for the manufacture of a device employing the production process | Vincent Larrey, Laurent Vandroux, Marie-Helene Vaudaine | 2015-04-07 |
| 8865564 | Process for producing vertical interconnections through structured layers | Jean-Philippe Polizzi | 2014-10-21 |
| 8692337 | Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration | Vincent Larrey, Jean-Philippe Polizzi, Marie-Helene Vaudaine, Hemant D. Desai, Woo Tae Park | 2014-04-08 |
| 8580597 | Making of a microelectronic device including a monocrystalline silicon NEMS component and a transistor the gate of which is made in the same layer as the mobile structure of this component | Eric Ollier | 2013-11-12 |