Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726689 | Wafer level micro-electro-mechanical systems package with accelerometer and gyroscope | Peter R. Harper, Demetre Kondylis | 2017-08-08 |
| 9409765 | Method and apparatus for an isolating structure | Viresh Piyush Patel | 2016-08-09 |
| 9250262 | Method and apparatus for an integrated isolation mechanical filter with substrate based package | Viresh Piyush Patel | 2016-02-02 |
| 9233836 | Semiconductor device including accelerometer devices | Lisa H. Karlin, Kemiao Jia | 2016-01-12 |
| 9131325 | MEMS device assembly and method of packaging same | Mark E. Schlarmann, Andrew C. McNeil | 2015-09-08 |
| 8921203 | Method of forming an integrated circuit having varying substrate depth | Lisa H. Karlin, Kemiao Jia | 2014-12-30 |
| 8692337 | Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration | Audrey Berthelot, Vincent Larrey, Jean-Philippe Polizzi, Marie-Helene Vaudaine, Woo Tae Park | 2014-04-08 |
| 8652865 | Attaching a MEMS to a bonding wafer | Lisa H. Karlin | 2014-02-18 |
| 8525316 | Eutectic flow containment in a semiconductor fabrication process | Lisa H. Karlin | 2013-09-03 |
| 8487387 | MEMS sensor device with multi-stimulus sensing | Yizhen Lin, Woo Tae Park, Mark E. Schlarmann | 2013-07-16 |
| 8461656 | Device structures for in-plane and out-of-plane sensing micro-electro-mechanical systems (MEMS) | Woo Tae Park, Lisa H. Karlin, Lianjun Liu, Heinz Loreck | 2013-06-11 |
| 8316718 | MEMS pressure sensor device and method of fabricating same | Yizhen Lin, Woo Tae Park, Mark E. Schlarmann | 2012-11-27 |
| 8216882 | Method of producing a microelectromechanical (MEMS) sensor device | Yizhen Lin, Woo Tae Park, Mark E. Schlarmann | 2012-07-10 |
| 7919006 | Method of anti-stiction dimple formation under MEMS | Woo Tae Park | 2011-04-05 |
| 7846815 | Eutectic flow containment in a semiconductor fabrication process | Lisa H. Karlin | 2010-12-07 |
| 7585744 | Method of forming a seal for a semiconductor device | Bishnu Prasanna Gogoi, Raymond M. Roop | 2009-09-08 |
| 7316965 | Substrate contact for a capped MEMS and method of making the substrate contact at the wafer level | Stephen R. Hooper, William G. McDonald, Arvind S. Salian | 2008-01-08 |
| 5654034 | Composite thermocouple protection tubes | Kenneth F. Tulloch, Lee E. Burns, Raymond L. Taylor | 1997-08-05 |
| 5102694 | Pulsed chemical vapor deposition of gradient index optical material | Raymond L. Taylor | 1992-04-07 |