Issued Patents All Time
Showing 1–25 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726107 | Inertial sensor sampling with combined sense axes | Jerome Enjalbert, Joel Cameron Beckwith, Jun Tang | 2023-08-15 |
| 11499987 | Z-axis inertial sensor with extended motion stops | Fengyuan Li | 2022-11-15 |
| 11029327 | Inertial sensor with suspension spring structure surrounding anchor | — | 2021-06-08 |
| 10809277 | Single axis inertial sensor with suppressed parasitic modes | Jun Tang, Kajal Rahimian Kordestani | 2020-10-20 |
| 10794701 | Inertial sensor with single proof mass and multiple sense axis capability | — | 2020-10-06 |
| 10712359 | Flexure with enhanced torsional stiffness and MEMS device incorporating same | — | 2020-07-14 |
| 10107701 | Pressure sensor with differential capacitive output | Yizhen Lin | 2018-10-23 |
| 9926187 | Microelectromechanical system devices having crack resistant membrane structures and methods for the fabrication thereof | Chad S. Dawson, Dubravka Bilic, Lianjun Liu | 2018-03-27 |
| 9790085 | Actively preventing charge induced leakage of semiconductor devices | Dubravka Bilic, Lianjun Liu, Margaret L. Kniffin, Chad S. Dawson, Colin Bryant Stevens | 2017-10-17 |
| 9714879 | Electrically conductive barriers for integrated circuits | Chad S. Dawson, Jinbang Tang | 2017-07-25 |
| 9689677 | MEMS device with common mode rejection structure | Peng Shao | 2017-06-27 |
| 9638712 | MEMS device with over-travel stop structure and method of fabrication | Jun Tang, Chad S. Dawson | 2017-05-02 |
| 9573799 | MEMS device having variable gap width and method of manufacture | Yizhen Lin, Lisa Z. Zhang | 2017-02-21 |
| 9506756 | Multiple axis rate sensor | Yizhen Lin | 2016-11-29 |
| 9500669 | System and method for calibrating an inertial sensor | Margaret L. Kniffin | 2016-11-22 |
| 9290067 | Pressure sensor with differential capacitive output | Yizhen Lin | 2016-03-22 |
| 9190937 | Stiction resistant mems device and method of operation | Yizhen Lin, Mark E. Schlarmann | 2015-11-17 |
| 9131325 | MEMS device assembly and method of packaging same | Mark E. Schlarmann, Hemant D. Desai | 2015-09-08 |
| 9103705 | Combined environmental parameter sensor | Dubravka Bilic | 2015-08-11 |
| 8927311 | MEMS device having variable gap width and method of manufacture | Yizhen Lin, Lisa Z. Zhang | 2015-01-06 |
| 8925384 | MEMS sensor with stress isolation and method of fabrication | Gary Li, Lisa Z. Zhang, Yizhen Lin | 2015-01-06 |
| 8921952 | Microelectromechanical system devices having crack resistant membrane structures and methods for the fabrication thereof | Chad S. Dawson, Dubravka Bilic, Lianjun Liu | 2014-12-30 |
| 8739627 | Inertial sensor with off-axis spring system | Gary Li, Yizhen Lin, Lisa Z. Zhang | 2014-06-03 |
| 8610222 | MEMS device with central anchor for stress isolation | Yizhen Lin, Gary Li, Todd F. Miller, Lisa Z. Zhang | 2013-12-17 |
| 8555719 | MEMS sensor with folded torsion springs | Gary Li | 2013-10-15 |