Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9573799 | MEMS device having variable gap width and method of manufacture | Andrew C. McNeil, Yizhen Lin | 2017-02-21 |
| 9003886 | Microelectromechanical systems devices and methods for the fabrication thereof | Yizhen Lin, Sung Jin Jo | 2015-04-14 |
| 8927311 | MEMS device having variable gap width and method of manufacture | Andrew C. McNeil, Yizhen Lin | 2015-01-06 |
| 8925384 | MEMS sensor with stress isolation and method of fabrication | Andrew C. McNeil, Gary Li, Yizhen Lin | 2015-01-06 |
| 8739627 | Inertial sensor with off-axis spring system | Gary Li, Yizhen Lin, Andrew C. McNeil | 2014-06-03 |
| 8610222 | MEMS device with central anchor for stress isolation | Yizhen Lin, Gary Li, Andrew C. McNeil, Todd F. Miller | 2013-12-17 |
| 7943525 | Method of producing microelectromechanical device with isolated microstructures | Lisa H. Karlin, Ruben B. Montez, Woo Tae Park | 2011-05-17 |