Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8539836 | MEMS sensor with dual proof masses | — | 2013-09-24 |
| 8468887 | Resonant accelerometer with low sensitivity to package stress | Yizhen Lin | 2013-06-25 |
| 8387464 | Laterally integrated MEMS sensor device with multi-stimulus sensing | Yizhen Lin, Woo Tae Park | 2013-03-05 |
| 8186220 | Accelerometer with over-travel stop structure | Aaron A. Geisberger, Yizhen Lin | 2012-05-29 |
| 8096182 | Capacitive sensor with stress relief that compensates for package stress | Yizhen Lin | 2012-01-17 |
| 8056415 | Semiconductor device with reduced sensitivity to package stress | Aaron A. Geisberger, Daniel N. Koury, Jr., Gary Li | 2011-11-15 |
| 8020443 | Transducer with decoupled sensing in mutually orthogonal directions | Yizhen Lin | 2011-09-20 |
| 7637160 | MEMS suspension and anchoring design | Daniel N. Koury, Jr. | 2009-12-29 |
| 7628072 | MEMS device and method of reducing stiction in a MEMS device | Daniel N. Koury, Jr. | 2009-12-08 |
| 7610809 | Differential capacitive sensor and method of making same | Yizhen Lin, Todd F. Miller | 2009-11-03 |
| 7578190 | Symmetrical differential capacitive sensor and method of making same | Yizhen Lin, Marco Fuhrmann | 2009-08-25 |
| 7528468 | Capacitor assembly with shielded connections and method for forming the same | Dubravka Bilic, Stephen R. Hooper | 2009-05-05 |
| 7487661 | Sensor having free fall self-test capability and method therefor | Akihiro Ueda | 2009-02-10 |
| 7121141 | Z-axis accelerometer with at least two gap sizes and travel stops disposed outside an active capacitor area | — | 2006-10-17 |
| 7005193 | Method of adding mass to MEMS structures | Gary Li, Gary O'Brien | 2006-02-28 |
| 6936492 | Single proof mass, 3 axis MEMS transducer | Gary Li, Daniel N. Koury, Jr. | 2005-08-30 |
| 6845670 | Single proof mass, 3 axis MEMS transducer | Gary Li, Daniel N. Koury, Jr. | 2005-01-25 |
| 6840106 | Sensor using an actuator for self-test and method therefor | — | 2005-01-11 |
| 6472243 | Method of forming an integrated CMOS capacitive pressure sensor | Bishnu Prasanna Gogoi, David J. Monk, David Odle, Kevin D. Neumann, Donald L. Hughes +2 more | 2002-10-29 |
| 6465320 | Electronic component and method of manufacturing | Daniel N. Koury, Jr., Bishnu Prasanna Gogoi | 2002-10-15 |
| 6352874 | Method of manufacturing a sensor | David J. Monk, Bishnu Prasanna Gogoi | 2002-03-05 |
| 6308577 | Circuit and method of compensating for membrane stress in a sensor | Ira E. Baskett | 2001-10-30 |
| 6122963 | Electronic component for measuring acceleration | Jonathan Hale Hammond, Daniel N. Koury, Jr., Richard J. August | 2000-09-26 |
| 5994161 | Temperature coefficient of offset adjusted semiconductor device and method thereof | Gordon Bitko, David J. Monk | 1999-11-30 |
| 5900530 | Method for testing pressure sensors | Gary O'Brien, Mark D. Summers | 1999-05-04 |