Issued Patents All Time
Showing 1–25 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105114 | Accelerometer having an over travel stop with a stop gap less than a minimum etch size | Jun Tang | 2024-10-01 |
| 11768220 | Accelerometer having an over travel stop with a stop gap less than a minimum etch size | Jun Tang | 2023-09-26 |
| 11525680 | Angular rate sensor with centrally positioned coupling structures | Peng Shao | 2022-12-13 |
| 11460301 | Angular rate sensor based on frequency modulation and drive strategy for same | — | 2022-10-04 |
| 10760909 | Angular rate sensor with in-phase drive and sense motion suppression | — | 2020-09-01 |
| 10683202 | MEMS device and method for calibrating a MEMS device | Yean Ling Teo, Laurent Cornibert | 2020-06-16 |
| 10502759 | MEMS device with two-stage motion limit structure | — | 2019-12-10 |
| 10330475 | Segmented electrode structure for quadrature reduction in an integrated device | Thierry Dominique Yves Cassagnes, Gerhard Trauth, Margaret L. Kniffin | 2019-06-25 |
| 10247753 | MEMS device with off-axis shock protection | Fengyuan Li | 2019-04-02 |
| 10209070 | MEMS gyroscope device | — | 2019-02-19 |
| 10126128 | Angular rate sensor | — | 2018-11-13 |
| 9834438 | Compensation and calibration for MEMS devices | Tehmoor M. Dar, Bruno J. Debeurre, Raimondo P. Sessego, Richard A. Deken, Krithivasan Suryanarayanan | 2017-12-05 |
| 9829406 | Differential capacitive output pressure sensor and method | Dubravka Bilic, Chad S. Dawson, Fengyuan Li | 2017-11-28 |
| 9745189 | MEMS device with isolation sub-frame structure | — | 2017-08-29 |
| 9720012 | Multi-axis inertial sensor with dual mass and integrated damping structure | Jun Tang, Margaret L. Kniffin | 2017-08-01 |
| 9663348 | MEMS device with isolation sub-frame structure | — | 2017-05-30 |
| 9637372 | Bonded wafer structure having cavities with low pressure and method for forming | Robert F. Steimle, Jeffrey D. Hanna, Ruben B. Montez | 2017-05-02 |
| 9346670 | MEMS device with differential vertical sense electrodes | Margaret L. Kniffin | 2016-05-24 |
| 9316665 | Estimation of sidewall skew angles of a structure | Kemiao Jia | 2016-04-19 |
| 9242851 | MEMS device with differential vertical sense electrodes | Margaret L. Kniffin | 2016-01-26 |
| 9221679 | Compensation and calibration for MEMS devices | Tehmoor M. Dar, Bruno J. Debeurre, Raimondo P. Sessego, Richard A. Deken, Krithivasan Suryanarayanan | 2015-12-29 |
| 9079763 | MEMS device with stress isolation and method of fabrication | — | 2015-07-14 |
| 8810030 | MEMS device with stress isolation and method of fabrication | — | 2014-08-19 |
| 8413509 | Spring member for use in a microelectromechanical systems sensor | — | 2013-04-09 |
| 8186220 | Accelerometer with over-travel stop structure | Yizhen Lin, Andrew C. McNeil | 2012-05-29 |