Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538718 | Method of producing semiconductor devices in a substrate including etching of the pattern of an etch mask and/or a reticle to create the first dicing lanes encircling the devices and second dicing lanes defined by fracture lines of the edges of the substrate | Audrey Berthelot | 2022-12-27 |
| 11312618 | Microdevice comprising at least two movable elements | Audrey Berthelot, Alain Jeanroy, Guillaume Lehee, Olivier Vancauwenberghe, Philippe Onfroy +1 more | 2022-04-26 |
| 10962367 | Mobile mass suspension system comprising means of connecting the mobile mass with optimised linearity | Philippe Onfroy, Thierry Verdot | 2021-03-30 |
| 10858242 | MEMS or NEMS device with stacked stop element | Guillaume Lehee, Philippe Onfroy | 2020-12-08 |
| 10472227 | Micro-device having a plurality of mobile elements arranged in a plurality of embedded cavities | Audrey Berthelot | 2019-11-12 |