Issued Patents All Time
Showing 76–95 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5939725 | Electron beam exposure apparatus | — | 1999-08-17 |
| 5929454 | Position detection apparatus, electron beam exposure apparatus, and methods associated with them | Susumu Goto | 1999-07-27 |
| 5905267 | Electron beam exposure apparatus and method of controlling same | — | 1999-05-18 |
| 5864142 | Electron beam exposure apparatus and method of controlling same | Susumu Goto | 1999-01-26 |
| 5834783 | Electron beam exposure apparatus and method, and device manufacturing method | Susumu Gotoh | 1998-11-10 |
| 5726740 | Projection exposure apparatus having illumination device with ring-like or spot-like light source | Takahisa Shiozawa, Hiroyuki Ishii, Shigeru Hayata | 1998-03-10 |
| 5715084 | Reflection and refraction optical system and projection exposure apparatus using the same | Kazuhiro Takahashi | 1998-02-03 |
| 5499076 | Exposure method and apparatus | — | 1996-03-12 |
| 5489966 | Projection exposure apparatus | Haruna Kawashima, Akiyoshi Suzuki | 1996-02-06 |
| 5463497 | Illumination device including an optical integrator defining a plurality of secondary light sources and related method | Akiyoshi Suzuki, Shunzo Imai | 1995-10-31 |
| 5448357 | Position detecting system for detecting a position of an object by detecting beat signals produced through interference of diffraction light | — | 1995-09-05 |
| 5363170 | Illumination device and projection exposure apparatus using the same | — | 1994-11-08 |
| 5345292 | Illumination device for projection exposure apparatus | Takahisa Shiozawa, Hiroyuki Ishii, Shigeru Hayata | 1994-09-06 |
| 5189494 | Position detecting method and apparatus | — | 1993-02-23 |
| 5182455 | Method of detecting relative positional deviation between two objects | — | 1993-01-26 |
| 5153773 | Illumination device including amplitude-division and beam movements | Akiyoshi Suzuki, Shunzo Imai | 1992-10-06 |
| 5120974 | Position detecting method and device using image pickup of a mark | — | 1992-06-09 |
| 5117254 | Projection exposure apparatus | Haruna Kawashima, Akiyoshi Suzuki | 1992-05-26 |
| 4974919 | Illuminating device | Masato Aketagawa, Takahisa Shiozawa | 1990-12-04 |
| 4947047 | Exposure system with exposure controlling acoustooptic element | — | 1990-08-07 |