Issued Patents All Time
Showing 51–75 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583430 | Electron beam exposure method and apparatus | — | 2003-06-24 |
| 6566664 | Charged-particle beam exposure apparatus and device manufacturing method | — | 2003-05-20 |
| 6559456 | Charged particle beam exposure method and apparatus | — | 2003-05-06 |
| 6559463 | Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method | Haruhito Ono, Yoshikiyo Yui | 2003-05-06 |
| 6552353 | Multi-electron beam exposure method and apparatus and device manufacturing method | — | 2003-04-22 |
| 6515409 | Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method | Yoshikiyo Yui | 2003-02-04 |
| 6483120 | Control system for a charged particle exposure apparatus | Yoshikiyo Yui | 2002-11-19 |
| 6472674 | Electron beam exposure system and method of manufacturing devices using the same | — | 2002-10-29 |
| 6472672 | Electron beam exposure apparatus and its control method | — | 2002-10-29 |
| 6466301 | Transfer apparatus and transfer method | Yoshikiyo Yui | 2002-10-15 |
| 6455211 | Pattern transfer method and apparatus, and device manufacturing method | Yoshikiyo Yui | 2002-09-24 |
| 6392243 | Electron beam exposure apparatus and device manufacturing method | — | 2002-05-21 |
| 6337485 | Electron beam exposure apparatus and its control method | — | 2002-01-08 |
| 6323499 | Electron beam exposure apparatus and method, and device manufacturing method | Susumu Gotoh | 2001-11-27 |
| 6274877 | Electron beam exposure apparatus | — | 2001-08-14 |
| 6229647 | Reflection and refraction optical system and projection exposure apparatus using the same | Kazuhiro Takahashi | 2001-05-08 |
| 6225637 | Electron beam exposure apparatus | Shigeru Terashima, Masahiko Okunuki, Akira Miyake, Shin Matsui | 2001-05-01 |
| 6166387 | Electron beam exposure apparatus and method | Susumu Gotoh | 2000-12-26 |
| 6137113 | Electron beam exposure method and apparatus | — | 2000-10-24 |
| 6124599 | Electron beam exposure system and method of manufacturing devices using the same | — | 2000-09-26 |
| 6107636 | Electron beam exposure apparatus and its control method | — | 2000-08-22 |
| 6104035 | Electron-beam exposure apparatus and method | — | 2000-08-15 |
| 6054713 | Electron beam exposure apparatus | Akira Miyake, Masahiko Okunuki, Shigeru Terashima, Shin Matsui | 2000-04-25 |
| 5981954 | Electron beam exposure apparatus | — | 1999-11-09 |
| 5973332 | Electron beam exposure method, and device manufacturing method using same | Susumu Gotoh | 1999-10-26 |