Issued Patents All Time
Showing 51–75 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6504896 | X-ray illumination optical system and x-ray reduction exposure apparatus | Masami Tsukamoto | 2003-01-07 |
| 6225637 | Electron beam exposure apparatus | Shigeru Terashima, Masato Muraki, Masahiko Okunuki, Shin Matsui | 2001-05-01 |
| 6070640 | Walk-through type waterproof screen apparatus | Yasuyuki Miyagawa, Kou Muraoka, Masahiko Honma | 2000-06-06 |
| 6054713 | Electron beam exposure apparatus | Masato Muraki, Masahiko Okunuki, Shigeru Terashima, Shin Matsui | 2000-04-25 |
| 6038279 | X-ray generating device, and exposure apparatus and semiconductor device production method using the X-ray generating device | Masami Tsukamoto | 2000-03-14 |
| 5896438 | X-ray optical apparatus and device fabrication method | Masami Tsukamoto | 1999-04-20 |
| 5848119 | Illumination system and exposure apparatus having the same | Masami Hayashida | 1998-12-08 |
| 5825844 | Optical arrangement and illumination method | Yutaka Watanabe | 1998-10-20 |
| 5789062 | Magnetic recording medium | Nobuhiro Umebayashi, Teruhisa Miyata, Yoshikazu Kai | 1998-08-04 |
| 5774313 | Magnetic disk which reduces deterioration in regenerated signals due to optical servo grooves | Kenji Tanaka, Teruhisa Miyata, Nobuhiro Umebayashi | 1998-06-30 |
| 5770335 | Mask and exposure apparatus using the same | Keiko Chiba | 1998-06-23 |
| 5606586 | X-ray exposure method and apparatus and device manufacturing method | Mitsuaki Amemiya, Yasuaki Fukuda, Yutaka Watanabe | 1997-02-25 |
| 5587860 | Magnetic disc cartridge including a magnetic disc having a cleaning sheet composed of a non-theroplastic fiber | Nobuhiro Umebayashi, Kunio Mizushima, Teruhisa Miyata | 1996-12-24 |
| 5503950 | Reflection type mask and manufacture of microdevices using the same | Yutaka Watanabe | 1996-04-02 |
| 5469489 | Production method of an x-ray mask structure, an x-ray mask structure produced thereby, and a device fabricated by using the x-ray mask structure | Yasuaki Fukuda, Hiroshi Maehara | 1995-11-21 |
| 5444758 | Beam position detecting device | Mitsuaki Amemiya | 1995-08-22 |
| 5400386 | Angle detecting device and optical apparatus, such as exposure apparatus, employing the same | Mitsuaki Amemiya | 1995-03-21 |
| 5394451 | Optical arrangement for exposure apparatus | Yutaka Watanabe | 1995-02-28 |
| 5256481 | Magnetic recording medium | Mikio Kishimoto, Masaya Funahashi, Teruhisa Miyata, Hitoshi Nagatani | 1993-10-26 |
| 5182153 | Flexible magnetic disc | Yoshinori Yamamoto | 1993-01-26 |
| 5101420 | X-ray mask support and process for preparation thereof | Nobuo Kushibiki, Hideo Kato, Yasuaki Fukuda | 1992-03-31 |
| 5082728 | Magnetic disc | Norio Akai, Tomizo Taniguchi | 1992-01-21 |
| 5079096 | Magnetic recording medium comprising a substrate coated with a primer which is a protonic acid doped polyaniline polymer | Tsugihiro Doi, Minoru Ezoe, Akira Ohtani | 1992-01-07 |
| 4956220 | Magnetic recording medium | Toshinobu Sueyoshi, Seiichi Asada, Masahiro Amemiya, Seigi Kawarai | 1990-09-11 |
| 4913959 | Magnetic recording medium | Mikio Kishimoto | 1990-04-03 |