Issued Patents All Time
Showing 76–100 of 131 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8602706 | Substrate processing apparatus | Robert T. Caveney | 2013-12-10 |
| 8573919 | Substrate transport apparatus | Ulysses Gilchrist | 2013-11-05 |
| 8562271 | Compact substrate transport system | Alexander Krupyshev, Ulysses Gilchrist | 2013-10-22 |
| 8398355 | Linearly distributed semiconductor workpiece processing tool | William H. Holtkamp, Izya Kremerman, Richard J. Pickreign | 2013-03-19 |
| 8371792 | Substrate processing apparatus | Robert T. Caveney | 2013-02-12 |
| 8328495 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Daniel Babbs, Robert C. May | 2012-12-11 |
| 8283813 | Robot drive with magnetic spindle bearings | Ulysses Gilchrist, Martin Hosek, Jairo T. Moura, Jay Krishnasamy | 2012-10-09 |
| 8272825 | Load lock fast pump vent | Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more | 2012-09-25 |
| 8272827 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Daniel Babbs, Robert C. May | 2012-09-25 |
| 8267634 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Daniel Babbs, Robert C. May | 2012-09-18 |
| 8267636 | Substrate transport apparatus | Robert T. Caveney | 2012-09-18 |
| 8237391 | Substrate processing apparatus with motors integral to chamber walls | Alexander Krupyshev | 2012-08-07 |
| 8222892 | Sensor for simultaneous position and gap measurement | Martin Hosek | 2012-07-17 |
| 8182192 | Equipment storage for substrate processing apparatus | Daniel A. Hall, William J. Fosnight, Jeff G. Araujo, Steven Allen, Glenn Sindledecker | 2012-05-22 |
| 8129984 | Multiple dimension position sensor | Martin Hosek, John F. Zettler, Alexander Krupyshev, Sergei Syssoev, Krzystof Majczak | 2012-03-06 |
| 8008884 | Substrate processing apparatus with motors integral to chamber walls | Alexander Krupyshev | 2011-08-30 |
| 7988398 | Linear substrate transport apparatus | Robert T. Caveney | 2011-08-02 |
| 7959395 | Substrate processing apparatus | Robert T. Caveney | 2011-06-14 |
| 7904182 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Mark Ives +2 more | 2011-03-08 |
| 7806643 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight | 2010-10-05 |
| 7798758 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Daniel Babbs, Robert C. May | 2010-09-21 |
| 7762755 | Equipment storage for substrate processing apparatus | Daniel A. Hall, William J. Fosnight, Jeff G. Araujo, Steven Allen, Glenn Sindledecker | 2010-07-27 |
| 7712808 | End effector with centering grip | Steve Bibeault, Ulysses Gilchrist | 2010-05-11 |
| 7607879 | Substrate processing apparatus with removable component module | Daniel A. Hall, William J. Fosnight, Robert T. Caveney, Ulysses Gilchrist, Jeff G. Araujo | 2009-10-27 |
| 7575406 | Substrate processing apparatus | Robert T. Caveney | 2009-08-18 |