Issued Patents All Time
Showing 51–75 of 131 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9548231 | Robot and adaptive placement system and method | Martin Hosek, Dennis Poole | 2017-01-17 |
| 9502952 | Hybrid motor | — | 2016-11-22 |
| 9478446 | Load lock chamber | Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more | 2016-10-25 |
| 9452527 | Robot having high stiffness coupling | — | 2016-09-27 |
| 9401294 | Compact substrate transport system | Alexander Krupyshev, Ulysses Gilchrist | 2016-07-26 |
| 9368382 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight | 2016-06-14 |
| 9330951 | Robot and adaptive placement system and method | Martin Hosek | 2016-05-03 |
| 9224628 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight, Daniel Babbs, Robert C. May | 2015-12-29 |
| 9196518 | Adaptive placement system and method | Martin Hosek | 2015-11-24 |
| 9149936 | Robot having arm with unequal link lengths | Martin Hosek | 2015-10-06 |
| 9033647 | Substrate alignment system | Mark Saunders | 2015-05-19 |
| 9024488 | Robot drive with magnetic spindle bearings | Ulysses Gilchrist, Martin Hosek, Jairo T. Moura, Jay Krishnasamy | 2015-05-05 |
| 9020617 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Mark Ives +2 more | 2015-04-28 |
| 8960099 | Substrate processing apparatus | Martin Hosek, Alexander Krupyshev | 2015-02-24 |
| 8888433 | Reduced capacity carrier and method of use | Ulysses Gilchrist, William J. Fosnight, Gerald M. Friedman, Michael L. Bufano | 2014-11-18 |
| 8827617 | Substrate processing apparatus | Robert T. Caveney | 2014-09-09 |
| 8823294 | Commutation of an electromagnetic propulsion and guidance system | Martin Hosek, Jairo T. Moura | 2014-09-02 |
| 8803513 | Multiple dimension position sensor | Martin Hosek, John F. Zettler, Alexander Krupyshev, Sergei Syssoev, Krzystof Majczak | 2014-08-12 |
| 8752449 | Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism | Alexander Krupyshev, Krysztof A. Majczak, Martin Hosek, Jay Krishnasamy | 2014-06-17 |
| 8747050 | Substrate transport apparatus | Robert T. Caveney | 2014-06-10 |
| 8716909 | Robot with heat dissipating stator | Martin Hosek, Tuan Ha, Dennis Poole | 2014-05-06 |
| 8680803 | Substrate processing apparatus with motors integral to chamber walls | Alexander Krupyshev | 2014-03-25 |
| 8678734 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Ulysses Gilchrist, William J. Fosnight | 2014-03-25 |
| 8662812 | Load lock fast pump vent | Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus, William J. Fosnight +3 more | 2014-03-04 |
| 8651789 | Substrate processing apparatus | Robert T. Caveney | 2014-02-18 |