Issued Patents All Time
Showing 101–125 of 131 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7572092 | Substrate alignment system | Mark Saunders | 2009-08-11 |
| 7522267 | Substrate transport apparatus with automated alignment | Martin Hosek, Stuart Beale | 2009-04-21 |
| 7255524 | Substrate cassette mapper | Ulysses Gilchrist | 2007-08-14 |
| 7192791 | Semiconductor wafer having an edge based identification feature | — | 2007-03-20 |
| 6960057 | Substrate transport apparatus | — | 2005-11-01 |
| 6485250 | Substrate transport apparatus with multiple arms on a common axis of rotation | — | 2002-11-26 |
| 6481956 | Method of transferring substrates with two different substrate holding end effectors | — | 2002-11-19 |
| 6364592 | Small footprint carrier front end loader | — | 2002-04-02 |
| 6364593 | Material transport system | Glenn Sindledecker | 2002-04-02 |
| 6318945 | Substrate processing apparatus with vertically stacked load lock and substrate transport robot | — | 2001-11-20 |
| 6309161 | Load lock with vertically movable support | — | 2001-10-30 |
| 6299404 | Substrate transport apparatus with double substrate holders | Richard S. Muka, James C. Davis | 2001-10-09 |
| 6250502 | Precision dispensing pump and method of dispensing | Daniel Cote, Jayanth Prabharkar | 2001-06-26 |
| 6231297 | Substrate transport apparatus with angled arms | — | 2001-05-15 |
| 6158941 | Substrate transport apparatus with double substrate holders | Richard S. Muka, James C. Davis | 2000-12-12 |
| 6139245 | Robot arm relocation system | — | 2000-10-31 |
| 6120229 | Substrate carrier as batchloader | — | 2000-09-19 |
| 6002840 | Substrate transport apparatus | — | 1999-12-14 |
| 5997235 | Swap out plate and assembly | — | 1999-12-07 |
| 5954472 | Batch loader arm | Christopher C. Kiley | 1999-09-21 |
| 5899658 | Articulated arm transfer device | — | 1999-05-04 |
| 5813823 | Articulated arm transfer device | — | 1998-09-29 |
| 5778968 | Method for heating or cooling wafers | Ruth Ann Hendrickson, Richard S. Muka | 1998-07-14 |
| 5769184 | Coaxial drive elevator | — | 1998-06-23 |
| 5765983 | Robot handling apparatus | Robert T. Caveney | 1998-06-16 |