Issued Patents All Time
Showing 126–131 of 131 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5743704 | Wide wrist articulated arm transfer device | Robert T. Caveney | 1998-04-28 |
| 5720590 | Articulated arm transfer device | — | 1998-02-24 |
| 5647724 | Substrate transport apparatus with dual substrate holders | James C. Davis | 1997-07-15 |
| 5588789 | Load arm for load lock | Richard S. Muka | 1996-12-31 |
| 5569014 | Frog-leg robot having walking-beams | — | 1996-10-29 |
| 4934212 | Harmonic drive flexspline manufacture | — | 1990-06-19 |