| 8934082 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2015-01-13 |
| 8859188 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Franciscus Johannes Joseph Janssen, Anthonie Kuijper |
2014-10-14 |
| 8817231 |
Lithographic apparatus and device manufacturing method involving a liquid confinement structure |
Hans Jansen, Marco Koert Stavenga |
2014-08-26 |
| 8446568 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2013-05-21 |
| 8246838 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga |
2012-08-21 |
| 8045137 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Hans Jansen, Marco Koert Stavenga |
2011-10-25 |
| 8004652 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2011-08-23 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2011-04-26 |
| 7914687 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga |
2011-03-29 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7764356 |
Lithographic apparatus and device manufacturing method |
Ronald Johannes Hultermans, Ton De Groot, Gerardus Everardus Marie Hannen |
2010-07-27 |
| 7710537 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Marco Koert Stavenga |
2010-05-04 |
| 7446850 |
Lithographic apparatus and device manufacturing method |
Ronald Johannes Hultermans, Ton De Groot, Gerardus Everardus Marie Hannen |
2008-11-04 |
| 7423720 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Marco Koert Stavenga |
2008-09-09 |
| 7397533 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Hans Jansen, Marco Koert Stavenga |
2008-07-08 |
| 7379155 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2008-05-27 |
| 7378025 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga |
2008-05-27 |
| 7110081 |
Lithographic apparatus and device manufacturing method |
Christian Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Antonius Theodorus Anna Maria Derksen, Joeri Lof +4 more |
2006-09-19 |