Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394141 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2019-08-27 |
| 9753383 | Radiation source and lithographic apparatus | Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more | 2017-09-05 |
| 9036132 | Clamping device, assembly and lithographic projection apparatus | Robertus Wilhelmus Veltman, Maarten Kees Jan Boon | 2015-05-19 |
| 8289498 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Petrus Rutgerus Bartray, Leon Martin Levasier, Bernardus Antonius Johannes Luttikhuis, Josephus Jacobus Smits +7 more | 2012-10-16 |