Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10379443 | Radiation source device, lithographic apparatus and device manufacturing method | Arjen Teake De Jong, Reinier Theodorus Martinus Jilisen | 2019-08-13 |
| 9036132 | Clamping device, assembly and lithographic projection apparatus | Dennis Jozef Maria Paulussen, Maarten Kees Jan Boon | 2015-05-19 |