Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673069 | High frequency filter for improved RF bias signal stability | Robert Chebi, Carl W. Almgren | 2017-06-06 |
| 7571698 | Low-frequency bias power in HDP-CVD processes | Rongping Wang, Canfeng Lai, Siamak Salimian | 2009-08-11 |
| 7425716 | Method and apparatus for reducing charge density on a dielectric coated substrate after exposure to a large area electron beam | Alexandros T. Demos, Khaled A. Elsheref, Tom K. Cho, Girish Dixit, Hichem M'Saad +1 more | 2008-09-16 |
| 5507930 | Method of sputtering a carbon protective film on a magnetic disk by superimposing an AC voltage on a DC bias voltage | Tsutomu Yamashita, Kyou H. Lee, Rajiv Yadav Ranjan | 1996-04-16 |