Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6245690 | Method of improving moisture resistance of low dielectric constant films | David Cheung, Nasreen Chopra, Yung-Cheng Lu, Robert P. Mandal, Farhad Moghadam | 2001-06-12 |
| 6209484 | Method and apparatus for depositing an etch stop layer | Judy H. Huang, David Cheung, Chan-Lon Yang | 2001-04-03 |
| 6171945 | CVD nanoporous silica low dielectric constant films | Robert P. Mandal, David Cheung | 2001-01-09 |
| 6156149 | In situ deposition of a dielectric oxide layer and anti-reflective coating | David Cheung, Judy H. Huang | 2000-12-05 |
| 6127262 | Method and apparatus for depositing an etch stop layer | Judy H. Huang, David Cheung, Chan-Lon Yang | 2000-10-03 |
| 6083852 | Method for applying films using reduced deposition rates | David Cheung, Joe Feng, Madhu Deshpande, Judy H. Huang | 2000-07-04 |
| 6072227 | Low power method of depositing a low k dielectric with organo silane | David Cheung, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2000-06-06 |
| 6054379 | Method of depositing a low k dielectric with organo silane | David Cheung, Shin-Puu Jeng, Kuowei Liu, Yung-Cheng Yu | 2000-04-25 |
| 6035803 | Method and apparatus for controlling the deposition of a fluorinated carbon film | Stuardo Robles, Ping Xu, Kaushal K. Singh | 2000-03-14 |
| 5968324 | Method and apparatus for depositing antireflective coating | David Cheung, Joe Feng, Judy H. Huang | 1999-10-19 |