Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8467896 | Feedback for polishing rate correction in chemical mechanical polishing | Jun Qian, Charles C. Garretson, Jeffrey Drue David, Harry Q. Lee | 2013-06-18 |
| 8337279 | Closed-loop control for effective pad conditioning | Stan Tsai, Daxin Mao, Sameer Deshpande, Shou-Sung Chang, Gregory E. Menk +4 more | 2012-12-25 |
| 8190285 | Feedback for polishing rate correction in chemical mechanical polishing | Jun Qian, Charles C. Garretson, Jeffrey Drue David, Harry Q. Lee | 2012-05-29 |