Issued Patents All Time
Showing 101–110 of 110 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458684 | Single step process for blanket-selective CVD aluminum deposition | Ted Guo, Liang-Yuh Chen, Roderick C. Mosely | 2002-10-01 |
| 6391771 | Integrated circuit interconnect lines having sidewall layers | Suketu Arun Parikh | 2002-05-21 |
| 6245662 | Method of producing an interconnect structure for an integrated circuit | Samuel Broydo | 2001-06-12 |
| 6204168 | Damascene structure fabricated using a layer of silicon-based photoresist material | Tim Weidman, Dian Sugiarto, Allen Zhao | 2001-03-20 |
| 6168726 | Etching an oxidized organo-silane film | Zongyu LI, Jian Ding | 2001-01-02 |
| 6169030 | Metallization process and method | Ted Guo, Liang-Yuh Chen, Roderick C. Mosely, Israel Beinglass | 2001-01-02 |
| 6139905 | Integrated CVD/PVD Al planarization using ultra-thin nucleation layers | Liang-Yuh Chen, Ted Guo, Roderick C. Mosely | 2000-10-31 |
| 6077781 | Single step process for blanket-selective CVD aluminum deposition | Ted Guo, Liang-Yuh Chen, Roderick C. Mosely | 2000-06-20 |
| 6054380 | Method and apparatus for integrating low dielectric constant materials into a multilevel metallization and interconnect structure | — | 2000-04-25 |
| 6017144 | Method and apparatus for depositing highly oriented and reflective crystalline layers using a low temperature seeding layer | Ted Guo, Liang Chen, Roderick C. Mosely, Israel Beinglass | 2000-01-25 |