Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5574410 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Jay D. Pinson, II, Douglas A. Buchberger, Jr., Robert HARTLAGE +1 more | 1996-11-12 |
| 5572170 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Jay D. Pinson, II, Douglas A. Buchberger, Jr., Robert HARTLAGE +1 more | 1996-11-05 |
| 5556501 | Silicon scavenger in an inductively coupled RF plasma reactor | Kenneth S. Collins, John Trow, Chan-Lon Yang, Jerry Wong, Jeffrey Marks +7 more | 1996-09-17 |
| 5539609 | Electrostatic chuck usable in high density plasma | Kenneth S. Collins, John Trow, Joshua Chiu-Wing Tsui, Nicolas Bright, Jeffrey Marks +2 more | 1996-07-23 |
| 5392018 | Electronically tuned matching networks using adjustable inductance elements and resonant tank circuits | Kenneth S. Collins, John Trow, Jay D. Pinson, II, Douglas A. Buchberger, Jr., Robert HARTLAGE +1 more | 1995-02-21 |
| 5350479 | Electrostatic chuck for high power plasma processing | Kenneth S. Collins, John Trow, Joshua Chiu-Wing Tsui, Nicolas Bright, Jeffrey Marks +1 more | 1994-09-27 |
| 5349313 | Variable RF power splitter | Kenneth S. Collins, John Trow | 1994-09-20 |
| 5300460 | UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers | Kenneth S. Collins, Chan-Lon Yang, David N. Wang, Dan Maydan | 1994-04-05 |
| 5210466 | VHF/UHF reactor system | Kenneth S. Collins, Chan-Lon Yang, David N. Wang, Dan Maydan | 1993-05-11 |
| 5187454 | Electronically tuned matching network using predictor-corrector control system | Kenneth S. Collins, John Trow, Jay D. Pinson, II, Douglas A. Buchberger, Jr. | 1993-02-16 |
| 5065118 | Electronically tuned VHF/UHF matching network | Kenneth S. Collins | 1991-11-12 |