Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6077357 | Orientless wafer processing on an electrostatic chuck | Kent Rossman, Shijian Li | 2000-06-20 |
| 5904776 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Arik Donde, Dan Maydan, Robert Steger, Edwin C. Weldon, Timothy Dyer | 1999-05-18 |
| 5876119 | In-situ substrate temperature measurement scheme in plasma reactor | Tetsuya Ishikawa | 1999-03-02 |
| 5761023 | Substrate support with pressure zones having reduced contact area and temperature feedback | Tetsuya Ishikawa, Fred C. Redeker, Manus Wong, Shijian Li | 1998-06-02 |
| 5748434 | Shield for an electrostatic chuck | Kent Rossman, Fred C. Redeker | 1998-05-05 |
| 5720818 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Arik Donde, Dan Maydan, Robert Steger, Edwin C. Weldon, Timothy Dyer | 1998-02-24 |
| 5715132 | Method and structure for improving gas breakdown resistance and reducing the potential of arcing in an electrostatic chuck | Robert Steger | 1998-02-03 |
| 5644467 | Method and structure for improving gas breakdown resistance and reducing the potential of arcing in a electrostatic chuck | Robert Steger | 1997-07-01 |