Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8951900 | Contact elements of a semiconductor device formed by electroless plating and excess material removal with reduced sheer forces | Axel Preusse, Norbert Schroeder | 2015-02-10 |
| 8622783 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, John Lampett, Heiko Wundram | 2014-01-07 |
| 8450197 | Contact elements of a semiconductor device formed by electroless plating and excess material removal with reduced sheer forces | Axel Preusse, Norbert Schroeder | 2013-05-28 |
| 7980922 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, John Lampett, Heiko Wundram | 2011-07-19 |
| 7476552 | Method of reworking a semiconductor structure | Axel Preusse, Markus Nopper | 2009-01-13 |
| 7150675 | Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner | Jens Kramer, Jens Kunath | 2006-12-19 |
| 6752697 | Apparatus and method for chemical mechanical polishing of a substrate | Gerd Marxsen | 2004-06-22 |
| 6699107 | Polishing head and apparatus with an improved pad conditioner for chemical mechanical polishing | Gerd Marxsen | 2004-03-02 |