Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8622783 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Uwe Stoeckgen, John Lampett, Heiko Wundram | 2014-01-07 | $3,415,000 |
| 8506770 | Electrochemical planarization system comprising enhanced electrolyte flow | Johannes Groschopf | 2013-08-13 | $2,792,000 |
| 7980922 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Uwe Stoeckgen, John Lampett, Heiko Wundram | 2011-07-19 | $3,440,000 |