Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8622783 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, Uwe Stoeckgen, Heiko Wundram | 2014-01-07 | $3,415,000 |
| 7980922 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, Uwe Stoeckgen, Heiko Wundram | 2011-07-19 | $3,440,000 |