Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8622783 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, Uwe Stoeckgen, Heiko Wundram | 2014-01-07 |
| 7980922 | Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet | Axel Kiesel, Uwe Stoeckgen, Heiko Wundram | 2011-07-19 |