Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055187 | Wet multi-plate clutch | Christian Denda, Stefan Steinmetz, Florian Krebs, Laurent Ineichen, Tobias Hebgen | 2024-08-06 |
| 10322493 | Chemical mechanical polishing apparatus | — | 2019-06-18 |
| 9685342 | Wafer processing apparatuses and methods of operating the same | Uwe Schoene | 2017-06-20 |
| 9312142 | Chemical mechanical polishing method and apparatus | — | 2016-04-12 |
| 7198542 | Method and system for controlling the chemical mechanical polishing by using a seismic signal of a seismic sensor | Thomas Gyulai, Arwed Reichel | 2007-04-03 |
| 7150675 | Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner | Uwe Stoeckgen, Jens Kunath | 2006-12-19 |
| 6957997 | Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner | Gerd Marxsen, Uwe Günter | 2005-10-25 |
| 6719655 | Electrodynamic drive system | — | 2004-04-13 |