| 11513079 |
Method and system for wafer defect inspection |
John Fretwell, Laurens Franz Taemsz Kwakman, Tomas Vystavel |
2022-11-29 |
| 11004651 |
Tomography-assisted TEM prep with requested intervention automation workflow |
Trevan Landin, Greg Clark |
2021-05-11 |
| 10453646 |
Tomography-assisted TEM prep with requested intervention automation workflow |
Trevan Landin, Greg Clark |
2019-10-22 |
| 9797923 |
Fabrication of a malleable lamella for correlative atomic-resolution tomographic analyses |
— |
2017-10-24 |
| 6455385 |
Semiconductor fabrication with multiple low dose implant |
Emi Ishida |
2002-09-24 |
| 6427345 |
Method and apparatus for a line based, two-dimensional characterization of a three-dimensional surface |
— |
2002-08-06 |
| 6293698 |
Method for precise temperature sensing and control of semiconductor structures |
— |
2001-09-25 |
| 5935867 |
Shallow drain extension formation by angled implantation |
Scott Luning, Peter Griffin |
1999-08-10 |
| 5918149 |
Deposition of a conductor in a via hole or trench |
Paul R. Besser, John A. Iacoponi |
1999-06-29 |
| 5864199 |
Electron beam emitting tungsten filament |
Janice Gray, Bryan Tracy |
1999-01-26 |
| 5727978 |
Method of forming electron beam emitting tungsten filament |
Janice Gray, Bryan Tracy |
1998-03-17 |
| 5713667 |
Temperature sensing probe for microthermometry |
Andrew Norman Erickson, Ayesha R. Raheem Kizchery, Jeremias D. Romero, Bryan Tracy |
1998-02-03 |
| 5710052 |
Scanning spreading resistance probe |
Andrew Norman Erickson |
1998-01-20 |
| 5707484 |
Method of accurate compositional analysis of dielectric films on semiconductors |
Jeremias D. Romero, Homi Fatemi |
1998-01-13 |
| 5650343 |
Self-aligned implant energy modulation for shallow source drain extension formation |
Scott Luning |
1997-07-22 |
| 5536940 |
Energy filtering for electron back-scattered diffraction patterns |
David J. Dingley |
1996-07-16 |