Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6190518 | Device for reducing plasma etch damage and method for manufacturing same | Tony Phan, Tom J. Goodwin | 2001-02-20 |
| 5963783 | In-line detection and assessment of net charge in PECVD silicon dioxide (oxide) layers | Fred N. Hause, Robert Dawson | 1999-10-05 |
| 5907764 | In-line detection and assessment of net charge in PECVD silicon dioxide (oxide) layers | Fred N. Hause, Robert Dawson | 1999-05-25 |
| 5891743 | Method of forming buried oxygen layer using MeV ion implantation | — | 1999-04-06 |
| 5841016 | Ultra-low level standard for concentration measurements | Tim Z. Hossain | 1998-11-24 |
| 5804981 | Method of detecting heavy metal impurities introduced into a silicon wafer during ion implantation | Norman L. Armour, Julia Sherry | 1998-09-08 |
| 5778039 | Method and apparatus for the detection of light elements on the surface of a semiconductor substrate using x-ray fluorescence (XRF) | Tim Z. Hossain | 1998-07-07 |
| 5657363 | Method and apparatus for determining the thickness and elemental composition of a thin film using radioisotopic X-ray fluorescence (RXRF) | Tim Z. Hossain | 1997-08-12 |
| 5581194 | Method and apparatus for passive optical characterization of semiconductor substrates subjected to high energy (MEV) ion implantation using high-injection surface photovoltage | — | 1996-12-03 |
| 5557409 | Characterization of an external silicon interface using optical second harmonic generation | Michael W. Downer, Jerry Dadap | 1996-09-17 |
| 5471293 | Method and device for determining defects within a crystallographic substrate | Mohammed Anjum, Valerie A. Wenner, Norman L. Armour, Maung H. Kyaw | 1995-11-28 |